University of Illinois Urbana-Champaign
Illinois Materials Research Science and Engineering Center
Electron Microscope Pixel Array Detector (EMPAD) for the FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM

The Electron Microscope Pixel Array Detector (EMPAD) is a pixelated detector for applications as 4D STEM acquiring diffraction pattern in each point of a map at a speed of up to 1,100 diffraction patterns per second. The EMPAD sensor is a 128x128 direct electron detector with pixels of 150 microns in size. It is sensitive to a single electron and has a dynamic range of 30 bits in single shot mode allowing for a maximum detectable current per pixel of 2pA @200kV.. The MRSEC purchase of the EMPAD adds a unique capability for users of MRL’s FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM.

Read more about this instrument’s features and capabilities, and how to access this instrument here:  https://mrl.illinois.edu/facilities/equipment/fei-themis-z-advanced-probe-aberration-corrected-analytical-temstem