The Grainger College of Engineering
Illinois Materials Research Science and Engineering Center

Facilities

Acknowledgments

All work primarily or partially supported by the MRSEC grant MUST include the following acknowledgment: "This research was primarily (partially) supported by the NSF through the University of Illinois at Urbana-Champaign Materials Research Science and Engineering Center DMR-2309037." For research performed using MRSEC supported facilities (instrumental or computational), please include the following text: "The authors acknowledge the use of facilities and instrumentation supported by NSF through the University of Illinois at Urbana-Champaign Materials Research Science and Engineering Center DMR-2309037."

AJA Orion-8 Sputtering System for Magnetic Materials

This is a multi-target sputter deposition system for synthesizing magnetic thin films. This tool is located in the MRL central facilities in room 336 MRL.

Bruker D8 Advance XRD/XRR System with High-Temperature Sample Stage

The Bruker D8 Advance diffractometer includes a vertical theta/theta goniometer with independent rotation of the x-ray tube, x-ray detector, sample stage tilt and spinning. All major x-ray diffraction (XRD) and reflectivity (XRR) applications are available in this system.

Electron Microscope Pixel Array Detector (EMPAD) for the FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM

The Electron Microscope Pixel Array Detector (EMPAD) is a pixelated detector for applications as 4D STEM acquiring diffraction pattern in each point of a map at a speed of up to 1,100 diffraction patterns per second.

Glove box transfer station for 2D device manufacture in an inert environment

Multi-chamber glove box with an in-situ microscope, 2D material transfer station, spinner and thermal evaporator. This integrated system allows for the manufacture of ultra-clean 2D heterostructures and devices and working with air-sensitive nanomaterials.

Horiba XploRA-nano TERS/TEPL

The XploRA PLUS Raman Microscope head-based tip-enhanced Raman spectroscopy (TERS) and tip enhanced photoluminescence (TEPL) from Horiba, Inc. is a fully integrated TERS/TEPL system based on SmartSPM state of the art scanning probe microscope (SPM) and XploRA Raman micro-spectrometer.

NT-MDT Atomic Force Microscope (AFM)

The NT-MDT AFM has built in all the standard scanned probe measurement capabilities including topography imaging, nanomechanical indentation and shear, and electrical imaging. It is primarily used for topography analysis of 2D materials and testing the cleanliness of 2D heterostructures.

Plasma Etch Oxygen Plasma Cleaner

The Plasma Etch is a 25 W direct oxygen plasma system primarily used for etching 2D materials and cleaning polymer residue from dirty samples.

Quantum Design MPMS3 SQUID Magnetometer (1 of 2)

The Quantum Design MPMS3 is a third-generation Magnetic Property Measurement System (MPMS) which uses a Superconducting Quantum Interference Device (SQUID) to measure the bulk magnetic moment of samples with < 10-8 emu sensitivity.

Quantum Design MPMS3 SQUID Magnetometer B (2 of 2)

The Quantum Design MPMS3 is a third-generation Magnetic Property Measurement System (MPMS) which uses a Superconducting Quantum Interference Device (SQUID) to measure the bulk magnetic moment of samples with < 10-8 emu sensitivity.

Tergeo Indirect Plasma Functionalization System

The Tergeo Plasma Cleaner is capable of direct or indirect oxygen or hydrogen plasmas. It is primarily used for chemical modification of 2D material surfaces, e.g. oxidization of chalcogenides or hydrogenation of graphene.

Two-color ultrafast pump-probe system with optical parametric oscillator

This system is used to study the magneto-optic response and heat capacity of materials through time-domain thermoreflectance and magneto-optic Kerr effect measurements. A scanning imaging system that uses the infrared output of the OPO system enables fast and high-resolution imaging of magnetic order. This tool is located in the MRL laser facility.