Rigaku Supermini200 Wavelength-dispersive X-Ray fluorescence spectometer

7/2/2026

The Rigaku Supermini 200 (WD-XRF) is a wavelength-dispersive x-ray fluorescence spectrometer capable of analyzing the Flourine – Uranium elemental range using a Palladium (Pd) X-ray source running at 50KV and 4mA (200 W). The energy resolution of 20-30 eV provides superior sensitivity and spectral resolution allowing for more accurate deconvolution and elemental quantification especially when compared to energy-dispersive x-ray fluorescence systems.

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The Rigaku Supermini 200 (WD-XRF) is a wavelength-dispersive x-ray fluorescence spectrometer capable of analyzing the Flourine – Uranium elemental range using a Palladium (Pd) X-ray source running at 50KV and 4mA (200 W). The energy resolution of 20-30 eV provides superior sensitivity and spectral resolution allowing for more accurate deconvolution and elemental quantification especially when compared to energy-dispersive x-ray fluorescence systems. This energy resolution is achieved using 3 analyzer crystals: LiF (200) for the Ti-U range, PET crystal for Al-Ti, and RX-26 multilayer crystal for F, Na, and Mg. Capable of running solids, liquids, and gases with a maximum sample size of 44m diameter and 33mm height. Automated measurements are facilitated by an easy to use bidirectional 12-position automatic sample changer with integrated sample spinner to improve sampling statistics.

Key features:

  • Elemental quantification for F - U range
  • Non-monochromatic Pd X-ray source at 50KV and 4mA (200W)
  • Compatible with solids, liquids, and gases (max size of 44m diameter and 30mm height)
  • High energy resolution (20-30eV) from 3 analyzer crystals; LiF, PET, and RX-26.
  • Measurements can be done in He or Vacuum.
  • Multipurpose sample holder with 30 mm mask (measuring area on sample surface) for a maximum sample size of 44 mm in outer diameter and 33 mm thickness.
  • Zr automatic primary beam filter is included to remove the Pd-K spectral lines resulting from the Pd target x-ray tube enabling the analysis of Cd, Ru, Rh, Pd, Ag, In.
  • ZSX control, measurement, and analysis software, including empirical regression analysis (5 matrix correction models), fundamental parameter analysis (bulk and thin films), automated PHA adjustment. Also, SQX software for semi-quantitative analysis with no standards required, in addition to SQX Matching Library and SQX Scatter FP Software.

This tool is located in room 148 MRL. Local and off-campus users interested in using these facilities should contact mrsec-info@illinois.edu to initiate the process.

This equipment was funded through the Illinois MRSEC NSF Award Number DMR-2309037Its use should be acknowledged in any published works, with the wording: “The authors acknowledge the use of facilities and instrumentation at the Materials Research Laboratory Central Research Facilities, University of Illinois, partially supported by NSF through the University of Illinois Materials Research Science and Engineering Center DMR-2309037.” Please also send a copy of the publication (email or hard copy), or the publication information (citation, DOI, or conference name and paper/poster title) to mrsec-info@illinois.edu


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This story was published July 2, 2026.